Control of an XY nano-positioning table for a compact nano-machine tool

@article{maeda2006control,
title={Control of an XY nano-positioning table for a compact nano-machine tool},
author={Maeda, Guilherme Jorge and Sato, Kaiji and Hashizume, Hitoshi and Shinshi, Tadahiko},
journal={JSME International Journal Series C Mechanical Systems, Machine Elements and Manufacturing},
volume={49},
number={1},
pages={21–27},
year={2006},
publisher={The Japan Society of Mechanical Engineers}
}